TY - BOOK ED - American Conference of Governmental Industrial Hygienists TI - Hazard assessment and conrol technology in semiconductor manufacturing T2 - Industrial hygiene science series SN - 0-87371-132-7 AV - TK7871.85 H39 1987 PY - 1989/// CY - Chelsea, michigan PB - Lewis KW - Industria de semiconductores KW - Medidas de seguridad KW - Congresos N1 - "papers presented at a symposium sponsored by the american conference of governmental industry hygienists and others held in cincinnati, ohio, oct. 20-22, 1987" ER -