| 000 | 00901nam^a2200205zi^4500 | ||
|---|---|---|---|
| 008 | 040830s1989^^^^^^^^^^^^^^^^^^000^0^eng^^ | ||
| 020 | _a0-87371-132-7 | ||
| 035 | _aMX001000544027 | ||
| 050 |
_aTK7871.85 _bH39 1987 |
||
| 245 | 0 | 0 | _aHazard assessment and conrol technology in semiconductor manufacturing |
| 264 | 1 |
_aChelsea, michigan : _bLewis, _cc1989 |
|
| 300 | _a322 páginas | ||
| 336 |
_atexto _2rdacontent |
||
| 337 |
_asin medio _2rdamedia |
||
| 338 |
_avolumen _2rdacarrier |
||
| 490 | 0 | _aIndustrial hygiene science series | |
| 500 | _a"papers presented at a symposium sponsored by the american conference of governmental industry hygienists and others held in cincinnati, ohio, oct. 20-22, 1987" | ||
| 650 |
_aIndustria de semiconductores _xMedidas de seguridad _vCongresos |
||
| 711 |
_aAmerican Conference of Governmental Industrial Hygienists _d(1987 : : _cCincinnati, Ohio) |
||